Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266542 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Mohand Brouri, Samantha Tan, Yiwen FAN, Wook Choi +3 more | 2025-04-01 |
| 12249514 | Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layers | Jon Henri, Karthik S. Colinjivadi, Francis Sloan Roberts, Kapu Sirish Reddy, Samantha Tan +4 more | 2025-03-11 |