Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266542 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Samantha Tan, Shih-Ked Lee, Yiwen FAN, Wook Choi +3 more | 2025-04-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266542 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Samantha Tan, Shih-Ked Lee, Yiwen FAN, Wook Choi +3 more | 2025-04-01 |