Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354871 | Ultrathin atomic layer deposition film accuracy thickness control | Jun Qian, Adrien LaVoie, Seiji Matsuyama, Purushottam Kumar | 2025-07-08 |
| 12261038 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Shankar Swaminathan, Jun Qian, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2025-03-25 |