Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354877 | Vapor deposition of films comprising molybdenum | Bhushan Zope, Eric Christopher Stevens, Eric James Shero, Robert Brennan Milligan | 2025-07-08 |
| 12293911 | Structure including SiOCN layer and method of forming same | YoungChol Byun, Bed Prasad Sharma, Eric James Shero | 2025-05-06 |
| 12261038 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Jun Qian, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2025-03-25 |
| 12215416 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Bhushan Zope, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2025-02-04 |
| 12203166 | Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicals | Amit Mishra, Bhushan Zope, Theodorus G.M. Oosterlaken | 2025-01-21 |