Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406871 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Carl Louis White, Herbert Terhorst, Eric James Shero | 2025-09-02 |
| 12354877 | Vapor deposition of films comprising molybdenum | Eric Christopher Stevens, Shankar Swaminathan, Eric James Shero, Robert Brennan Milligan | 2025-07-08 |
| 12215416 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Shankar Swaminathan, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2025-02-04 |
| 12203166 | Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicals | Amit Mishra, Shankar Swaminathan, Theodorus G.M. Oosterlaken | 2025-01-21 |