Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406871 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Herbert Terhorst, Eric James Shero, Bhushan Zope | 2025-09-02 |
| 12319999 | Refillable large volume solid precursor sublimation vessel | Mohith Verghese, David Marquardt | 2025-06-03 |
| 12276023 | Showerhead assembly for distributing a gas within a reaction chamber | Melvin Verbaas, Jereld Lee Winkler, John Kevin Shugrue | 2025-04-15 |
| 12247286 | Heater assembly including cooling apparatus and method of using same | Eric James Shero, Kyle Fondurulia, Timothy J. Sullivan | 2025-03-11 |