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Eddy current monitoring to detect vibration in polishing |
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Determining substrate precession with acoustic signals |
Nicholas A. Wiswell, Benjamin Cherian, Thomas H. Osterheld |
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Polishing apparatus using machine learning and compensation for pad thickness |
Kun Xu, Denis Ivanov, Harry Q. Lee |
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Autonomous lane change method and apparatus, and storage medium |
Chen CHEN, Wulong Liu |
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Generating synthetic training data including document images with key-value pairs |
Yazhe Hu, Tao SHENG |
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Multi-stage machine learning model training for key-value extraction |
Yazhe Hu, Jeaff Wang, Mengqing Guo, Tao SHENG |
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Ultrathin atomic layer deposition film accuracy thickness control |
Hu Kang, Adrien LaVoie, Seiji Matsuyama, Purushottam Kumar |
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Residue measurement from machine learning based processing of substrate images |
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Machine vision as input to a CMP process control algorithm |
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Gapfill of variable aspect ratio features with a composite PEALD and PECVD method |
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| D1067472 |
LED light bulb |
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2025-03-18 |
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Vision-based document language identification by joint supervision |
Liyu Gong, Yuying Wang, Zhonghai Deng, Iman Zadeh |
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Techniques for dynamic time-based custom model generation |
Olaitan Philip Olaleye, Arunjeyan T V Seshier Venkatachalapathy, Jinghou Zhang |
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