Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403561 | Eddy current monitoring to detect vibration in polishing | Kun Xu, Patrick A. Higashi, Hassan G. Iravani, Harry Q. Lee, Eric T. Wu +4 more | 2025-09-02 |
| 12392427 | Insulated fluid lines in chemical mechanical polishing | Chad Pollard, Hari Soundararajan, Paul D. Butterfield, Shou-Sung Chang, Calvin Spencer Lee +1 more | 2025-08-19 |
| 12318882 | Apparatus and method for CMP temperature control | Shou-Sung Chang, Hari Soundararajan, Jianshe Tang | 2025-06-03 |
| 12296427 | Apparatus and method for CMP temperature control | Shou-Sung Chang, Chih Chung Chou, Jianshe Tang, Hui Chen, Hari Soundararajan +1 more | 2025-05-13 |
| 12290896 | Apparatus and method for CMP temperature control | Shou-Sung Chang, Hari Soundararajan, Jianshe Tang | 2025-05-06 |
| 12290897 | Fluid-tight electrical connection techniques for semiconductor processing | Chad Pollard, Shou-Sung Chang | 2025-05-06 |
| 12214468 | Temperature control of chemical mechanical polishing | Hari Soundararajan, Yen-Chu Yang, Jianshe Tang, Shou-Sung Chang, Shih-Haur Shen +1 more | 2025-02-04 |