Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320883 | Resistivity-based adjustment of thresholds for in-situ monitoring | Kun Xu, Ingemar Carlsson, Boguslaw A. Swedek, Tzu-Yu Liu | 2025-06-03 |
| 12214468 | Temperature control of chemical mechanical polishing | Haosheng Wu, Hari Soundararajan, Yen-Chu Yang, Jianshe Tang, Shou-Sung Chang +1 more | 2025-02-04 |