Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400881 | Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning | Wei Lu, Jimin Zhang, Brian J. Brown | 2025-08-26 |
| 12318882 | Apparatus and method for CMP temperature control | Shou-Sung Chang, Hari Soundararajan, Haosheng Wu | 2025-06-03 |
| 12296427 | Apparatus and method for CMP temperature control | Haosheng Wu, Shou-Sung Chang, Chih Chung Chou, Hui Chen, Hari Soundararajan +1 more | 2025-05-13 |
| 12290896 | Apparatus and method for CMP temperature control | Shou-Sung Chang, Hari Soundararajan, Haosheng Wu | 2025-05-06 |
| 12285838 | Wafer edge asymmetry correction using groove in polishing pad | Jimin Zhang, Brian J. Brown, Wei Lu, Priscilla Diep LaRosa | 2025-04-29 |
| 12214468 | Temperature control of chemical mechanical polishing | Haosheng Wu, Hari Soundararajan, Yen-Chu Yang, Shou-Sung Chang, Shih-Haur Shen +1 more | 2025-02-04 |