Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12214468 | Temperature control of chemical mechanical polishing | Haosheng Wu, Hari Soundararajan, Jianshe Tang, Shou-Sung Chang, Shih-Haur Shen +1 more | 2025-02-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12214468 | Temperature control of chemical mechanical polishing | Haosheng Wu, Hari Soundararajan, Jianshe Tang, Shou-Sung Chang, Shih-Haur Shen +1 more | 2025-02-04 |