Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12296427 | Apparatus and method for CMP temperature control | Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Hui Chen, Hari Soundararajan +1 more | 2025-05-13 |
| 12233505 | Polishing system with capacitive shear sensor | Nicholas A. Wiswell, Dominic J. Benvegnu | 2025-02-25 |