Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320883 | Resistivity-based adjustment of thresholds for in-situ monitoring | Kun Xu, Ingemar Carlsson, Shih-Haur Shen, Tzu-Yu Liu | 2025-06-03 |
| 12257665 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Jun Qian, Nicholas A. Wiswell, Dominic J. Benvegnu, Thomas H. Osterheld | 2025-03-25 |