Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420373 | Control of processing parameters during substrate polishing using cost function | Sivakumar Dhandapani | 2025-09-23 |
| 12403560 | Determining substrate precession with acoustic signals | Nicholas A. Wiswell, Jun Qian, Thomas H. Osterheld | 2025-09-02 |
| 12343840 | Control of processing parameters for substrate polishing with substrate precession | Eric Lau, Charles C. Garretson, Huanbo Zhang, Zhize Zhu, Brian J. Brown +1 more | 2025-07-01 |
| 12311494 | Pressure signals during motor torque monitoring to provide spatial resolution | Thomas Li | 2025-05-27 |
| 12257665 | Machine vision as input to a CMP process control algorithm | Jun Qian, Nicholas A. Wiswell, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld | 2025-03-25 |