Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420373 | Control of processing parameters during substrate polishing using cost function | Benjamin Cherian | 2025-09-23 |
| 12384003 | Methods of modeling and controlling pad wear | — | 2025-08-12 |
| 12272047 | Residue measurement from machine learning based processing of substrate images | Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian, Kiran Shrestha | 2025-04-08 |