Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12343840 | Control of processing parameters for substrate polishing with substrate precession | Eric Lau, Huanbo Zhang, Zhize Zhu, Benjamin Cherian, Brian J. Brown +1 more | 2025-07-01 |
| 12251788 | Polishing head with local wafer pressure | Andrew J. Nagengast, Steven M. Zuniga, Jay Gurusamy, Vladimir Galburt | 2025-03-18 |