Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12330262 | Dual membrane carrier head for chemical mechanical polishing | Steven M. Zuniga, Jay Gurusamy | 2025-06-17 |
| 12251788 | Polishing head with local wafer pressure | Steven M. Zuniga, Jay Gurusamy, Charles C. Garretson, Vladimir Galburt | 2025-03-18 |
| 12214469 | Polishing head retaining ring tilting moment control | Steven M. Zuniga, Jay Gurusamy | 2025-02-04 |