| 12400892 |
High throughput polishing modules and modular polishing systems |
Jagan Rangarajan, Edward Golubovsky, Steven M. Zuniga |
2025-08-26 |
| 12394651 |
High throughput polishing modules and modular polishing systems |
Jagan Rangarajan, Edward Golubovsky, Steven M. Zuniga |
2025-08-19 |
| 12365060 |
Chemical mechanical polishing correction tool |
Steven M. Zuniga |
2025-07-22 |
| 12337439 |
Multiple disk pad conditioner |
Steven M. Zuniga, Takashi Fujikawa, Jeonghoon Oh |
2025-06-24 |
| 12330262 |
Dual membrane carrier head for chemical mechanical polishing |
Steven M. Zuniga, Andrew J. Nagengast |
2025-06-17 |
| 12251787 |
Modular chemical mechanical polisher with simultaneous polishing and pad treatment |
Steven M. Zuniga |
2025-03-18 |
| 12251788 |
Polishing head with local wafer pressure |
Andrew J. Nagengast, Steven M. Zuniga, Charles C. Garretson, Vladimir Galburt |
2025-03-18 |
| 12214469 |
Polishing head retaining ring tilting moment control |
Andrew J. Nagengast, Steven M. Zuniga |
2025-02-04 |
| 12194591 |
Roller for location-specific wafer polishing |
Ekaterina A. Mikhaylichenko, Fred C. Redeker, Brian J. Brown, Chirantha Rodrigo, Steven M. Zuniga |
2025-01-14 |
