Issued Patents 2025
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400892 | High throughput polishing modules and modular polishing systems | Jagan Rangarajan, Edward Golubovsky, Steven M. Zuniga | 2025-08-26 |
| 12394651 | High throughput polishing modules and modular polishing systems | Jagan Rangarajan, Edward Golubovsky, Steven M. Zuniga | 2025-08-19 |
| 12365060 | Chemical mechanical polishing correction tool | Steven M. Zuniga | 2025-07-22 |
| 12337439 | Multiple disk pad conditioner | Steven M. Zuniga, Takashi Fujikawa, Jeonghoon Oh | 2025-06-24 |
| 12330262 | Dual membrane carrier head for chemical mechanical polishing | Steven M. Zuniga, Andrew J. Nagengast | 2025-06-17 |
| 12251787 | Modular chemical mechanical polisher with simultaneous polishing and pad treatment | Steven M. Zuniga | 2025-03-18 |
| 12251788 | Polishing head with local wafer pressure | Andrew J. Nagengast, Steven M. Zuniga, Charles C. Garretson, Vladimir Galburt | 2025-03-18 |
| 12214469 | Polishing head retaining ring tilting moment control | Andrew J. Nagengast, Steven M. Zuniga | 2025-02-04 |
| 12194591 | Roller for location-specific wafer polishing | Ekaterina A. Mikhaylichenko, Fred C. Redeker, Brian J. Brown, Chirantha Rodrigo, Steven M. Zuniga | 2025-01-14 |