Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400880 | Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber | Eli Jeon, Douglas Walter Agnew, Daniel Boatright, Arun Anandhan Duraisamy, Joseph R. Abel +1 more | 2025-08-26 |
| 12308264 | Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports | Ravi Kumar, Pulkit Agarwal, Adrien LaVoie, Ramesh Chandrasekharan | 2025-05-20 |
| 12209312 | Temperature control of a multi-zone pedestal | Ramesh Chandrasekharan, Aaron Bingham, Ashish Saurabh, Adrien LaVoie, Pulkit Agarwal +1 more | 2025-01-28 |
| 12186851 | Use of vacuum during transfer of substrates | Ramesh Chandrasekharan, Paul Konkola, Michael G. R. Smith, Brian Joseph Williams, Ravi Kumar +2 more | 2025-01-07 |