Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400880 | Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber | Michael Philip Roberts, Douglas Walter Agnew, Daniel Boatright, Arun Anandhan Duraisamy, Joseph R. Abel +1 more | 2025-08-26 |