Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431349 | In-situ control of film properties during atomic layer deposition | Douglas Walter Agnew, Ian John Curtin, Purushottam Kumar, Awnish Gupta | 2025-09-30 |
| 12417943 | Reducing intralevel capacitance in semiconductor devices | Bart J. van Schravendijk, Ian John Curtin, Douglas Walter Agnew, Dustin Zachary Austin, Awnish Gupta | 2025-09-16 |
| 12412742 | Impurity reduction in silicon-containing films | Awnish Gupta, Bart J. van Schravendijk, Jason Alexander Varnell, Jennifer Leigh Petraglia, Adrien LaVoie | 2025-09-09 |
| 12400880 | Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber | Eli Jeon, Michael Philip Roberts, Douglas Walter Agnew, Daniel Boatright, Arun Anandhan Duraisamy +1 more | 2025-08-26 |
| 12322619 | Dynamic process control in semiconductor manufacturing | Purushottam Kumar, Tengfei Miao, Gengwei Jiang, Daniel Ho, Siddappa Attur +1 more | 2025-06-03 |
| 12288685 | Modifying hydrophobicity of a wafer surface using an organosilicon precursor | Jeremy David Fields, Awnish Gupta, Douglas Walter Agnew, Purushottam Kumar | 2025-04-29 |
| 12252782 | In-situ PECVD cap layer | Jeremy David Fields, Ian John Curtin, Frank L. Pasquale, Douglas Walter Agnew | 2025-03-18 |