Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300488 | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill | Ieva Narkeviciute, Bo Gong, Bhadri N. Varadarajan | 2025-05-13 |
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Thadeous Bamford, Curtis Bailey, Tony Kaushal, Krishna Birru +11 more | 2025-02-18 |