Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394608 | Cleaning system for removing deposits from pump in an exhaust of a substrate processing system | Krishna Birru, Gang Liu, Anand Chandrashekar, Gishun Hsu | 2025-08-19 |
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2025-02-18 |