Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272521 | Plasma sources and plasma processing apparatus thereof | Vladimir Nagorny, Wei Liu | 2025-04-08 |
| 12272531 | Dual pressure oxidation method for forming an oxide layer in a feature | Christopher S. Olsen, Tsung-Han Yang, David Knapp, Lara Hawrylchak | 2025-04-08 |
| 12211677 | Uniformity control for plasma processing | Vladimir Nagorny | 2025-01-28 |