Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272521 | Plasma sources and plasma processing apparatus thereof | Wei Liu, Rene George | 2025-04-08 |
| 12266560 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang, Malcolm J. Bevan +2 more | 2025-04-01 |
| 12211677 | Uniformity control for plasma processing | Rene George | 2025-01-28 |