Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354843 | Process chamber process kit with protective coating | Jian-Lin Wu, Wei Liu, Theresa Kramer Guarini, Linlin Wang, Lara Hawrylchak | 2025-07-08 |
| 12266560 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang +2 more | 2025-04-01 |