Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431361 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Victor Nguyen, Mihaela Balseanu, Li-Qun Xia, Keiichi Tanaka | 2025-09-30 |
| 12305275 | Corrosion resistant film on a chamber component and methods of depositing thereof | Lisa J. Enman, Mark Saly, Lei Zhou | 2025-05-20 |