Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431361 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Mihaela Balseanu, Li-Qun Xia, Keiichi Tanaka, Steven Marcus | 2025-09-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431361 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Mihaela Balseanu, Li-Qun Xia, Keiichi Tanaka, Steven Marcus | 2025-09-30 |