Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12282256 | Photoresist deposition using independent multichannel showerhead | Farzad Houshmand, Anantha K. Subramani, Kelvin Chan, Lakmal C. Kalutarage, Mark Saly | 2025-04-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12282256 | Photoresist deposition using independent multichannel showerhead | Farzad Houshmand, Anantha K. Subramani, Kelvin Chan, Lakmal C. Kalutarage, Mark Saly | 2025-04-22 |