Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340978 | Symmetric and irregular shaped plasmas using modular microwave sources | Thai Cheng Chua, Christian Amormino, Philip Allan Kraus | 2025-06-24 |
| 12282256 | Photoresist deposition using independent multichannel showerhead | Wayne French, Anantha K. Subramani, Kelvin Chan, Lakmal C. Kalutarage, Mark Saly | 2025-04-22 |