Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340978 | Symmetric and irregular shaped plasmas using modular microwave sources | Farzad Houshmand, Christian Amormino, Philip Allan Kraus | 2025-06-24 |
| 12315739 | Isotropic silicon nitride removal | Mikhail Korolik, Paul Edward Gee, Wei Ying Doreen Yong, Tuck Foong Koh, John Sudijono +1 more | 2025-05-27 |
| 12300497 | Method and apparatus of low temperature plasma enhanced chemical vapor deposition of graphene | Christian Valencia, Chikuang Charles Wang, Bencherki Mebarki, Hanh Nguyen, Philip Allan Kraus | 2025-05-13 |
| 12198966 | Substrate support with multiple embedded electrodes | Philip Allan Kraus, Jaeyong Cho | 2025-01-14 |
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik +1 more | 2025-01-07 |