Selective etch of a substrate

Assignee

• Applied Materials

Inventors

• David Thompson (117 patents)
• Bhaskar Jyoti Bhuyan (63 patents)
• Mark Saly (110 patents)
• Lisa J. Enman (8 patents)
• Aaron Dangerfield (8 patents)
• Jesus Candelario Mendoza (1 patents)
• Jeffrey W. Anthis (75 patents)
• Lakmal C. Kalutarage (31 patents)

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