Methods of selective atomic layer deposition

Assignee

• Applied Materials

Inventors

• Bhaskar Jyoti Bhuyan (63 patents)
• Mark Saly (110 patents)
• David Thompson (117 patents)
• Tobin Kaufman-Osborn (28 patents)
• Kurt Fredrickson (4 patents)
• Thomas Knisley (46 patents)
• Liqi Wu (22 patents)

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