Deposition of semiconductor integration films

Assignee

• Applied Materials

Inventors

• Lakmal C. Kalutarage (31 patents)
• Mark Saly (110 patents)
• Bhaskar Jyoti Bhuyan (63 patents)
• Thomas Knisley (46 patents)
• Kelvin Chan (72 patents)
• Regina Freed (36 patents)
• David Thompson (117 patents)
• Susmit Singha Roy (21 patents)
• Madhur Sachan (14 patents)

View full patent text on Google Patents →