Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12317378 | Multi-zone heater control for wafer processing equipment | Kiyki-Shiy Shang, Dmitry A. Dzilno | 2025-05-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12317378 | Multi-zone heater control for wafer processing equipment | Kiyki-Shiy Shang, Dmitry A. Dzilno | 2025-05-27 |