Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12317378 | Multi-zone heater control for wafer processing equipment | Uwe Haller, Dmitry A. Dzilno | 2025-05-27 |
| 12283500 | Methods and systems for temperature control for a substrate | Paul Z. Wirth, Mikhail Taraboukhine | 2025-04-22 |