Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283500 | Methods and systems for temperature control for a substrate | Kiyki-Shiy Shang, Mikhail Taraboukhine | 2025-04-22 |
| 12278134 | Servo-control system | Behzad Taheri | 2025-04-15 |
| 12215966 | Methods and systems of optical inspection of electronic device manufacturing machines | Mohsin Waqar, Todd James Brill, Paul Fisher, Ilias Iliopoulos, Charles G. Potter | 2025-02-04 |