Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823910 | Systems and methods for improving planarity using selective atomic layer etching (ALE) | Anthony Dip, Masanobu Igeta | 2023-11-21 |
| 11742241 | ALD (atomic layer deposition) liner for via profile control and related applications | Xinghua Sun, Yen-Tien Lu, Angelique Raley, Jeffrey Smith | 2023-08-29 |
| 11651967 | Non-atomic layer deposition (ALD) method of forming sidewall passivation layer during high aspect ratio carbon layer etch | Shihsheng Chang, Andrew Metz, Yun Han | 2023-05-16 |
| 11621164 | Method for critical dimension (CD) trim of an organic pattern used for multi-patterning purposes | Katie Lutker-Lee, Angelique Raley | 2023-04-04 |
| 11621190 | Method for filling recessed features in semiconductor devices with a low-resistivity metal | Kai-Hung Yu, Nicholas Joy, Gyanaranjan Pattanaik, Robert D. Clark, Kandabara Tapily +3 more | 2023-04-04 |
| 11567407 | Method for globally adjusting spacer critical dimension using photo-active self-assembled monolayer | Richard A. Farrell, Hoyoung Kang | 2023-01-31 |