Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834745 | Spatial atomic layer deposition | — | 2023-12-05 |
| 11823910 | Systems and methods for improving planarity using selective atomic layer etching (ALE) | David L. O'Meara, Masanobu Igeta | 2023-11-21 |
| 11781220 | Multiple zone gas injection for control of gas phase radicals | — | 2023-10-10 |