Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841617 | Method of forming a narrow trench | Anton J. deVilliers, Jodi Grzeskowiak, Daniel Fulford, Jeffrey Smith | 2023-12-12 |
| 11676817 | Method for pitch split patterning using sidewall image transfer | Akiteru Ko | 2023-06-13 |
| 11567407 | Method for globally adjusting spacer critical dimension using photo-active self-assembled monolayer | Hoyoung Kang, David L. O'Meara | 2023-01-31 |