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Anton J. deVilliers

TL Tokyo Electron Limited: 22 patents #3 of 865Top 1%
Overall (2023): #1,702 of 537,848Top 1%
22
Patents 2023

Issued Patents 2023

Showing 1–22 of 22 patents

Patent #TitleCo-InventorsDate
11854806 Method for pattern reduction using a staircase spacer Daniel Fulford 2023-12-26
11848236 Method for recessing a fill material within openings formed on a patterned substrate Michael Murphy 2023-12-19
11841617 Method of forming a narrow trench Jodi Grzeskowiak, Daniel Fulford, Richard A. Farrell, Jeffrey Smith 2023-12-12
11810854 Multi-dimensional vertical switching connections for connecting circuit elements Mark I. Gardner, H. Jim Fulford 2023-11-07
11782346 Method of patterning a substrate using a sidewall spacer etch mask Jodi Grzeskowiak, Anthony R. Schepis 2023-10-10
11776808 Planarization of spin-on films Anthony R. Schepis 2023-10-03
11776812 Method for pattern reduction using a staircase spacer Daniel Fulford 2023-10-03
11764113 Method of 3D logic fabrication to sequentially decrease processing temperature and maintain material thermal thresholds Jeffrey Smith, Daniel Chanemougame, Lars Liebmann, Paul Gutwin, Robert D. Clark 2023-09-19
11735525 Power delivery network for CFET with buried power rails Lars Liebmann, Jeffrey Smith, Daniel Chanemougame 2023-08-22
11721551 Localized stress regions for three-dimension chiplet formation Daniel Fulford, Anthony R. Schepis, Mark I. Gardner, H. Jim Fulford 2023-08-08
11721582 Method of making 3D circuits with integrated stacked 3D metal lines for high density circuits Mark I. Gardner, H. Jim Fulford 2023-08-08
11694957 Programmable connection segment and method of forming the same Mark I. Gardner, H. Jim Fulford 2023-07-04
11688642 Localized stress regions for three-dimension chiplet formation Daniel Fulford, Anthony R. Schepis, Mark I. Gardner, H. Jim Fulford 2023-06-27
11682559 Method to form narrow slot contacts Michael Murphy, Jodi Grzeskowiak 2023-06-20
11676968 Coaxial contacts for 3D logic and memory Lars Liebmann, Jeffrey Smith, Kandabara Tapily 2023-06-13
11640937 Horizontal programmable conducting bridges between conductive lines H. Jim Fulford, Mark I. Gardner 2023-05-02
11640118 Method of pattern alignment for field stitching 2023-05-02
11631671 3D complementary metal oxide semiconductor (CMOS) device and method of forming the same H. Jim Fulford, Mark I. Gardner, Daniel Chanemougame, Jeffrey Smith, Lars Liebmann +1 more 2023-04-18
11630397 Method for producing overlay results with absolute reference for semiconductor manufacturing 2023-04-18
11616020 Power distribution network for 3D logic and memory Lars Liebmann, Jeffrey Smith, Kandabara Tapily 2023-03-28
11616053 Method to vertically route a logic cell incorporating stacked transistors in a three dimensional logic device Jeffrey Smith, Kandabara Tapily 2023-03-28
11574845 Apparatus and method for simultaneous formation of diffusion break, gate cut, and independent N and P gates for 3D transistor devices Daniel Chanemougame, Lars Liebmann, Jeffrey Smith 2023-02-07