Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841617 | Method of forming a narrow trench | Anton J. deVilliers, Daniel Fulford, Richard A. Farrell, Jeffrey Smith | 2023-12-12 |
| 11782346 | Method of patterning a substrate using a sidewall spacer etch mask | Anthony R. Schepis, Anton J. deVilliers | 2023-10-10 |
| 11682559 | Method to form narrow slot contacts | Michael Murphy, Anton J. deVilliers | 2023-06-20 |
| 11656550 | Controlling semiconductor film thickness | Daniel Fulford, Michael Murphy, Jeffrey Smith | 2023-05-23 |