Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848236 | Method for recessing a fill material within openings formed on a patterned substrate | Anton J. deVilliers | 2023-12-19 |
| 11747733 | Freeze-less methods for self-aligned double patterning | Charlotte Cutler | 2023-09-05 |
| 11682559 | Method to form narrow slot contacts | Jodi Grzeskowiak, Anton J. deVilliers | 2023-06-20 |
| 11656550 | Controlling semiconductor film thickness | Daniel Fulford, Jodi Grzeskowiak, Jeffrey Smith | 2023-05-23 |