Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11747733 | Freeze-less methods for self-aligned double patterning | Michael Murphy | 2023-09-05 |
| 11733609 | Silicon-containing underlayers | Li Cui, Shintaro Yamada, Paul J. LaBeaume, Suzanne M. Coley, James F. Cameron +1 more | 2023-08-22 |