Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762294 | Coating composition for photoresist underlayer | Joshua Kaitz, Sheng Liu, Li Cui, Shintaro Yamada, Iou-Sheng Ke | 2023-09-19 |
| 11733609 | Silicon-containing underlayers | Charlotte Cutler, Li Cui, Shintaro Yamada, Paul J. LaBeaume, James F. Cameron +1 more | 2023-08-22 |