Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791167 | Cyclic self-limiting etch process | Hoyoung Kang | 2023-10-17 |
| 11782346 | Method of patterning a substrate using a sidewall spacer etch mask | Jodi Grzeskowiak, Anton J. deVilliers | 2023-10-10 |
| 11776808 | Planarization of spin-on films | Anton J. deVilliers | 2023-10-03 |
| 11721551 | Localized stress regions for three-dimension chiplet formation | Anton J. deVilliers, Daniel Fulford, Mark I. Gardner, H. Jim Fulford | 2023-08-08 |
| 11688642 | Localized stress regions for three-dimension chiplet formation | Anton J. deVilliers, Daniel Fulford, Mark I. Gardner, H. Jim Fulford | 2023-06-27 |