Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791167 | Cyclic self-limiting etch process | Anthony R. Schepis | 2023-10-17 |
| 11567407 | Method for globally adjusting spacer critical dimension using photo-active self-assembled monolayer | Richard A. Farrell, David L. O'Meara | 2023-01-31 |