Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676817 | Method for pitch split patterning using sidewall image transfer | Richard A. Farrell | 2023-06-13 |
| 11651965 | Method and system for capping of cores for self-aligned multiple patterning | Eric Chih-Fang Liu | 2023-05-16 |
| 11626271 | Surface fluorination remediation for aluminium oxide electrostatic chucks | Scott Lefevre | 2023-04-11 |
| 11615958 | Methods to reduce microbridge defects in EUV patterning for microelectronic workpieces | — | 2023-03-28 |
| 11557479 | Methods for EUV inverse patterning in processing of microelectronic workpieces | Eric Chih-Fang Liu, Subhadeep Kal, Toshiharu Wada | 2023-01-17 |
| 11551930 | Methods to reshape spacer profiles in self-aligned multiple patterning | Kazuya Okubo, Hiroyuki Toshima | 2023-01-10 |