Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557479 | Methods for EUV inverse patterning in processing of microelectronic workpieces | Eric Chih-Fang Liu, Akiteru Ko, Subhadeep Kal | 2023-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557479 | Methods for EUV inverse patterning in processing of microelectronic workpieces | Eric Chih-Fang Liu, Akiteru Ko, Subhadeep Kal | 2023-01-17 |