Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756790 | Method for patterning a dielectric layer | Yen-Tien Lu, Xinghua Sun, Shihsheng Chang, Angelique Raley, Katie Lutker-Lee | 2023-09-12 |
| 11651965 | Method and system for capping of cores for self-aligned multiple patterning | Akiteru Ko | 2023-05-16 |
| 11557479 | Methods for EUV inverse patterning in processing of microelectronic workpieces | Akiteru Ko, Subhadeep Kal, Toshiharu Wada | 2023-01-17 |